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Silicide Technology for Integrated Circuits [electronic resource] / L.J. Chen (ed.)
Stevenage IET 2004
book jacket
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 Electronic Book  WEB LINK    AVAIL. VIA WEB
Subject(s) Germanium alloys
Integrated circuits
Iron compounds
Silicon alloys
Silicon-on-insulator technology
Physical Description 300
Summary This book begins with an overview of silicide technology and moves on to provide the fundamentals of silicide formation, including various processing methods. Topics such as the optical emission properties of Fe silicide and their importance for Si-based optoelectronics are discussed, along with Si-Ge and SOI, which represent two possible substrate frames for the next-generation of Si-based device technology. This invaluable publication also provides comprehensive coverage of the characterisation methods used in silicide technology
Series Circuits, Devices and Systems

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