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SIMOX [electronic resource] / M. Anc (ed.)
Stevenage IET 2004
book jacket
Location Call Number Status
 Electronic Book  WEB LINK    AVAIL. VIA WEB
Subject(s) Ion implantation
Silicon-on-insulator technology
Physical Description 159
Summary SIMOX explores Separation-by-implanted-oxygen technology, a method of fabricating silicon-on-insulator structures and substrates by implanting high doses of oxygen and high temperature annealing. The book consists of sequence of chapters, each written by a key of contributor to the field and represents the first effort to compile broad knowledge of this still evolving technology. It provides the reader with a basic understanding of SIMOX technology and a background for further investigations and applications
Series Circuits, Devices and Systems

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