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Microfabrication and nanomanufacturing / edited by Mark J. Jackson
Boca Raton, FL : CRC/Taylor & Francis, 2006
book jacket
Location Call Number Status
 Electronic Book  TK7836 .M523 2006    AVAIL. VIA WEB
Subject(s) Microelectronics
Integrated circuits -- Design and construction
Microelectromechanical systems -- Design and construction
Physical Description 401 p. : ill. ; 27 cm
Note Includes bibliographical references and index
Also available as an electronic resource. CRC Press (
Alternate Author Jackson, Mark J

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